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VDI/VDE 2655 Blatt 1.2:2010-10

Current

Current

The latest, up-to-date edition.

Optical measurement of microtopography - Calibration of confocal microscopes and depth setting standards for roughness measurement

Available format(s)

Hardcopy , PDF

Language(s)

German - English

Published date

10-01-2010

US$107.80
Excluding Tax where applicable

Preliminary note
Introduction
1 Scope
2 Terms and definitions
3 Symbols and subscripts
4 Properties of confocal
  microscopes
5 Calibration and specification
6 Report of results of the
  instrument calibration
7 Measurement uncertainty
Bibliography

The guideline describes procedures for the calibration of imaging confocal microscopes and depth setting standards for roughness measurement and thus forms the basis for the traceability of measuring systems to national standards.

DevelopmentNote
Supersedes VDE-VDI 2604. (10/2010)
DocumentType
Standard
Pages
36
PublisherName
Verlag des Vereins Deutscher Ingenieure
Status
Current
Supersedes

ISO 12179:2000 Geometrical Product Specifications (GPS) Surface texture: Profile method Calibration of contact (stylus) instruments
ISO 4287:1997 Geometrical Product Specifications (GPS) — Surface texture: Profile method — Terms, definitions and surface texture parameters
EN ISO 4288:1997 Geometrical product specifications (GPS) - Surface texture: Profile method - Rules and procedures for the assessment of surface texture (ISO 4288:1996)
VDI 1000:2017-02 VDI Standardisation Work - Principles and procedures
ISO 3274:1996 Geometrical Product Specifications (GPS) — Surface texture: Profile method — Nominal characteristics of contact (stylus) instruments
ISO 12853:2015 Microscopes Information provided to the user
ENV 13005 : DRAFT 1999 GUIDE TO THE EXPRESSION OF UNCERTAINTY IN MEASUREMENT
ISO 5436-1:2000 Geometrical Product Specifications (GPS) — Surface texture: Profile method; Measurement standards — Part 1: Material measures
DIN EN ISO 11562:1998-09 GEOMETRICAL PRODUCT SPECIFICATIONS (GPS) - SURFACE TEXTURE: PROFILE METHOD - METROLOGICAL CHARACTERISTICS OF PHASE CORRECT FILTERS
EN ISO 3274:1997 Geometrical product specifications (GPS) - Surface texture: Profile method - Nominal characteristics of contact (stylus) instruments (ISO 3274:1996)
DKD-3 : 1998 EXPRESSION OF THE UNCERTAINTY OF MEASUREMENT IN CALIBRATION

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