VDI/VDE 2655 Blatt 1.1:2008-03
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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Optical measurement and microtopographies - Calibration of interference microscopes and depth measurement standards for roughness measurement
Hardcopy , PDF
02-02-2024
German - English
03-01-2008
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Preliminary note
Introduction
1. Scope
2. Terms and definitions
3. Symbols and subscript symbols
4. Properties of the interference microscope
5. Reference standards and calibration methods
6. Report of results of instrument calibration
7. Measurement uncertainty
Bibliography
This guideline VDI/VDE 2655 Part 1.1 applies to interference microscopes for measuring the topography of technical surfaces.
| DocumentType |
Standard
|
| Pages |
39
|
| PublisherName |
Verlag des Vereins Deutscher Ingenieure
|
| Status |
Superseded
|
| SupersededBy | |
| Supersedes |
| EN ISO 25178-604:2013 | Geometrical product specifications (GPS) - Surface texture: Areal - Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments (ISO 25178-604:2013) |
| UNI EN ISO 25178-604 : 2013 | GEOMETRICAL PRODUCT SPECIFICATIONS (GPS) - SURFACE TEXTURE: AREAL - PART 604: NOMINAL CHARACTERISTICS OF NON-CONTACT (COHERENCE SCANNING INTERFEROMETRY) INSTRUMENTS |
| ISO 25178-604:2013 | Geometrical product specifications (GPS) — Surface texture: Areal — Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments |
| DIN EN ISO 25178-604:2013-12 | GEOMETRICAL PRODUCT SPECIFICATION (GPS) - SURFACE TEXTURE: AREAL - PART 604: NOMINAL CHARACTERISTICS OF NON-CONTACT (COHERENCE SCANNING INTERFEROMETRY) INSTRUMENTS (ISO 25178-604:2013) |
| VDI/VDE 2656 Blatt 1:2008-06 | Determination of geometrical quantities by using of Scanning Probe Microscopes - Calibration of measurement systems |
| BS EN ISO 25178-604:2013 | Geometrical product specifications (GPS). Surface texture: Areal Nominal characteristics of non-contact (coherence scanning interferometry) instruments |
| VDE-VDI 2604 : 1971 | SURFACE MEASURING METHODS; ROUGHNESS ANALYSIS BY MEANS OF INTERFERENCE MICROSCOPY |
| ISO 12179:2000 | Geometrical Product Specifications (GPS) Surface texture: Profile method Calibration of contact (stylus) instruments |
| ISO 4287:1997 | Geometrical Product Specifications (GPS) — Surface texture: Profile method — Terms, definitions and surface texture parameters |
| EN ISO 4288:1997 | Geometrical product specifications (GPS) - Surface texture: Profile method - Rules and procedures for the assessment of surface texture (ISO 4288:1996) |
| DKD-R 4-2 : 1991 | CALIBRATION OF STYLUS INSTRUMENTS |
| VDI 1000:2017-02 | VDI Standardisation Work - Principles and procedures |
| ISO 3274:1996 | Geometrical Product Specifications (GPS) — Surface texture: Profile method — Nominal characteristics of contact (stylus) instruments |
| ISO 12853:2015 | Microscopes Information provided to the user |
| ISO 5436-1:2000 | Geometrical Product Specifications (GPS) — Surface texture: Profile method; Measurement standards — Part 1: Material measures |
| DIN EN ISO 11562:1998-09 | GEOMETRICAL PRODUCT SPECIFICATIONS (GPS) - SURFACE TEXTURE: PROFILE METHOD - METROLOGICAL CHARACTERISTICS OF PHASE CORRECT FILTERS |
| EN ISO 3274:1997 | Geometrical product specifications (GPS) - Surface texture: Profile method - Nominal characteristics of contact (stylus) instruments (ISO 3274:1996) |
| EN ISO 5436-1:2000 | Geometrical Product Specifications (GPS) - Surface texture: Profile method; Measurement standards - Part 1: Material measures (ISO 5436-1:2000) |
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