UNI EN ISO 25178-604 : 2013
Current
The latest, up-to-date edition.
GEOMETRICAL PRODUCT SPECIFICATIONS (GPS) - SURFACE TEXTURE: AREAL - PART 604: NOMINAL CHARACTERISTICS OF NON-CONTACT (COHERENCE SCANNING INTERFEROMETRY) INSTRUMENTS
10-03-2013
Foreword
Introduction
1 Scope
2 Terms and definitions
3 Descriptions of the influence quantities
Annex A (informative) - Overview and components
of a coherence scanning interferometry
(CSI) microscope
Annex B (informative) - Coherence scanning interferometry
(CSI) theory of operation
Annex C (informative) - Spatial resolution
Annex D (informative) - Example procedure for estimating
surface topography repeatability
Annex E (informative) - Relation to the GPS matrix model
Bibliography
Defines the metrological characteristics of coherence scanning interferometry (CSI) systems for 3D mapping of surface height.
| Committee |
CT 47
|
| DocumentType |
Standard
|
| PublisherName |
Ente Nazionale Italiano di Unificazione (UNI)
|
| Status |
Current
|
| Standards | Relationship |
| EN ISO 25178-604:2013 | Identical |
| ISO 25178-604:2013 | Identical |
| ISO/TR 14638:1995 | Geometrical product specification (GPS) Masterplan |
| ISO 8015:2011 | Geometrical product specifications (GPS) Fundamentals Concepts, principles and rules |
| ISO 4287:1997 | Geometrical Product Specifications (GPS) — Surface texture: Profile method — Terms, definitions and surface texture parameters |
| ISO 14978:2006 | Geometrical product specifications (GPS) General concepts and requirements for GPS measuring equipment |
| ISO 25178-6:2010 | Geometrical product specifications (GPS) — Surface texture: Areal — Part 6: Classification of methods for measuring surface texture |
| ISO 10934-2:2007 | Optics and optical instruments Vocabulary for microscopy Part 2: Advanced techniques in light microscopy |
| ISO 14253-1:2017 | Geometrical product specifications (GPS) — Inspection by measurement of workpieces and measuring equipment — Part 1: Decision rules for verifying conformity or nonconformity with specifications |
| ISO 25178-603:2013 | Geometrical product specifications (GPS) — Surface texture: Areal — Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments |
| ISO 25178-3:2012 | Geometrical product specifications (GPS) — Surface texture: Areal — Part 3: Specification operators |
| ISO/IEC Guide 99:2007 | International vocabulary of metrology Basic and general concepts and associated terms (VIM) |
| ISO 3274:1996 | Geometrical Product Specifications (GPS) — Surface texture: Profile method — Nominal characteristics of contact (stylus) instruments |
| VDI/VDE 2655 Blatt 1.1:2008-03 | Optical measurement and microtopographies - Calibration of interference microscopes and depth measurement standards for roughness measurement |
| ISO 9334:2007 | Optics and photonics Optical transfer function Definitions and mathematical relationships |
| ISO 25178-601:2010 | Geometrical product specifications (GPS) — Surface texture: Areal — Part 601: Nominal characteristics of contact (stylus) instruments |
| ISO 25178-602:2010 | Geometrical product specifications (GPS) — Surface texture: Areal — Part 602: Nominal characteristics of non-contact (confocal chromatic probe) instruments |
| ISO 25178-2:2012 | Geometrical product specifications (GPS) Surface texture: Areal Part 2: Terms, definitions and surface texture parameters |
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