UNI EN ISO 14644-9 : 2012
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 9: CLASSIFICATION OF SURFACE CLEANLINESS BY PARTICLE CONCENTRATION
07-23-2013
01-01-2012
Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Abbreviated terms
5 Classification system
6 Demonstration of compliance
Annex A (informative) - Surface characteristics
Annex B (informative) - Descriptor for specific particle
size ranges
Annex C (informative) - Parameters influencing the
SCP classification
Annex D (informative) - Measurement methods for
determining surface cleanliness by particle
concentration
Bibliography
Describes the classification of cleanliness levels on solid surfaces by particle concentration in cleanrooms and associated controlled environment applications.
| DocumentType |
Standard
|
| PublisherName |
Ente Nazionale Italiano di Unificazione (UNI)
|
| Status |
Superseded
|
| SupersededBy |
| Standards | Relationship |
| EN ISO 14644-9:2012 | Identical |
| ISO 14644-9:2012 | Identical |
| SEMI E78 : 2012 | GUIDE TO ASSESS AND CONTROL ELECTROSTATIC DISCHARGE (ESD) AND ELECTROSTATIC ATTRACTION (ESA) FOR EQUIPMENT |
| ISO 14644-6:2007 | Cleanrooms and associated controlled environments Part 6: Vocabulary |
| ISO 4287:1997 | Geometrical Product Specifications (GPS) — Surface texture: Profile method — Terms, definitions and surface texture parameters |
| ISO 10015:1999 | Quality management Guidelines for training |
| ISO 16232-3:2007 | Road vehicles Cleanliness of components of fluid circuits Part 3: Method of extraction of contaminants by pressure rinsing |
| IEC 61340-5-1:2016 | Electrostatics - Part 5-1: Protection of electronic devices from electrostatic phenomena - General requirements |
| ISO 16232-2:2007 | Road vehicles Cleanliness of components of fluid circuits Part 2: Method of extraction of contaminants by agitation |
| ISO 16232-5:2007 | Road vehicles Cleanliness of components of fluid circuits Part 5: Method of extraction of contaminants on functional test bench |
| ISO 16232-4:2007 | Road vehicles Cleanliness of components of fluid circuits Part 4: Method of extraction of contaminants by ultrasonic techniques |
| ISO 10576-1:2003 | Statistical methods — Guidelines for the evaluation of conformity with specified requirements — Part 1: General principles |
| SEMI E43 : 2013 | RECOMMENDED PRACTICE FOR ELETROSTATIC MEASUREMENTS ON OBJECTS AND SURFACES |
| IEST RP CC022.2 : 2004(R2008) | ELECTROSTATIC CHARGE IN CLEANROOMS AND OTHER CONTROLLED ENVIRONMENTS |
| ISO/TS 21748:2004 | Guidance for the use of repeatability, reproducibility and trueness estimates in measurement uncertainty estimation |
| CLC/TR 61340-5-2:2008 | Electrostatics - Part 5-2: Protection of electronic devices from electrostatic phenomena - User guide |
| IEST STD CC1246 : 2013 | PRODUCT CLEANLINESS LEVELS - APPLICATIONS, REQUIREMENTS, AND DETERMINATION |
| ISO 5725-2:1994 | Accuracy (trueness and precision) of measurement methods and results Part 2: Basic method for the determination of repeatability and reproducibility of a standard measurement method |
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