SN EN ISO 14644-4 : 2001

Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Requirements
5 Planning and design
  5.1 Planning procedure
  5.2 Design
6 Construction and start-up
7 Testing and approval
  7.1 General
  7.2 Construction approval
  7.3 Functional approval
  7.4 Operational approval
8 Documentation
  8.1 General
  8.2 Record of an installation
  8.3 Operational instructions
  8.4 Instructions for performance monitoring
  8.5 Maintenance instructions
  8.6 Maintenance record
  8.7 Record of operation and maintenance training
Annex A (informative) Control and segregation concepts
Annex B (informative) Classification examples
Annex C (informative) Approval of an installation
Annex D (informative) Layout of an installation
Annex E (informative) Construction and materials
Annex F (informative) Environmental control of cleanrooms
Annex G (informative) Control of air cleanliness
Annex H (informative) Additional specification of
        requirements to be agreed upon between
        purchaser/user and designer/supplier
Bibliography

Describes requirements for the design and construction of cleanroom installations but does not prescribe specific technological or contractual means to meet these requirements.