SEMI S28 : 2011
Current
Current
The latest, up-to-date edition.
SAFETY GUIDELINE FOR ROBOTS AND LOAD PORTS INTENDED FOR USE IN SEMICONDUCTOR MANUFACTURING EQUIPMENT
Published date
01-12-2013
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Specifies a set of performance and design based safety considerations for load ports and wafer handling robots that are intended to be integrated into semiconductor manufacturing equipment (SME).
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (12/2011)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
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