SEMI S16 : 2007(R2012)
Current
Current
The latest, up-to-date edition.
GUIDE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT DESIGN FOR REDUCTION OF ENVIRONMENTAL IMPACT AT END OF LIFE
Published date
01-12-2013
Gives guidance to minimize environmental impacts in consideration of end of life of semiconductor manufacturing equipment (SME) or its components.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (01/2003)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| SEMI E149 : 2014 | GUIDE FOR EQUIPMENT SUPPLIER-PROVIDED DOCUMENTATION FOR THE ACQUISITION AND USE OF MANUFACTURING EQUIPMENT |
| SEMI E35 : 2012 | GUIDE TO CALCULATE COST OF OWNERSHIP (COO) METRICS FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT |
| SEMI S12 : 2011 | ENVIRONMENTAL, HEALTH AND SAFETY GUIDELINE FOR MANUFACTURING EQUIPMENT DECONTAMINATION |
| SEMI S13 : 2013 | ENVIRONMENTAL, HEALTH AND SAFETY GUIDELINE FOR DOCUMENTS PROVIDED TO THE EQUIPMENT USER FOR USE WITH MANUFACTURING EQUIPMENT |
| SEMI S2 : 2016B | ENVIRONMENTAL, HEALTH, AND SAFETY GUIDELINE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT |
| SEMI S13 : 2013 | ENVIRONMENTAL, HEALTH AND SAFETY GUIDELINE FOR DOCUMENTS PROVIDED TO THE EQUIPMENT USER FOR USE WITH MANUFACTURING EQUIPMENT |
| SEMI S12 : 2011 | ENVIRONMENTAL, HEALTH AND SAFETY GUIDELINE FOR MANUFACTURING EQUIPMENT DECONTAMINATION |
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