SEMI E58 : JUL 2003
Current
Current
The latest, up-to-date edition.
AUTOMATED RELIABILITY, AVAILABILITY, AND MAINTAINABILITY STANDARD (ARAMS): CONCEPTS, BEHAVIOR, AND SERVICES
Published date
01-12-2013
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Specifies various terms and equipment states but was not written specifically for application by automated equipment, consistent interpretation of these equipment states through formal state model methodology. ARAMS defines concepts, behavior, and message services to support the integration of automated systems within a semiconductor factory.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001) Includes SEMI E58.1. INACTIVE - Not currently supported by the technical committee. (03/2017)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
| SEMI E81 : 2000(R2007) | PROVISIONAL SPECIFICATION FOR CIM FRAMEWORK DOMAIN ARCHITECTURE |
| SEMI E116 : 2017 | SPECIFICATION FOR EQUIPMENT PERFORMANCE TRACKING |
| SEMI E10 : 2014E | SPECIFICATION FOR DEFINITION AND MEASUREMENT OF EQUIPMENT RELIABILITY, AVAILABILITY, AND MAINTAINABILITY (RAM) AND UTILIZATION |
| SEMI E79 : 2014E | SPECIFICATION FOR DEFINITION AND MEASUREMENT OF EQUIPMENT PRODUCTIVITY |
| SEMI E98 : 2009 | PROVISIONAL STANDARD FOR THE OBJECT-BASED EQUIPMENT MODEL (OBEM) |
| SEMI E124 : 2007(R2013) | GUIDE FOR DEFINITION AND CALCULATION OF OVERALL FACTORY EFFICIENCY (OFE) AND OTHER ASSOCIATED FACTORY-LEVEL PRODUCTIVITY METRICS |
| SEMI M49 : 2016 | GUIDE FOR SPECIFYING GEOMETRY MEASUREMENT SYSTEMS FOR SILICON WAFERS FOR THE 130 NM TO 16 NM TECHNOLOGY GENERATIONS |
| SEMI M52 : 2014 | GUIDE FOR SPECIFYING SCANNING SURFACE INSPECTION SYSTEMS FOR SILICON WAFERS FOR THE 130 NM TO 11 NM TECHNOLOGY GENERATIONS |
| SEMI E30.1 : 2017 | SPECIFICATION FOR INSPECTION AND REVIEW SPECIFIC EQUIPMENT MODEL (ISEM) |
| SEMI E30.5 : 2002(R2017) | SPECIFICATION FOR METROLOGY SPECIFIC EQUIPMENT MODEL (MSEM) |
| SEMI E127 : 2008 | SPECIFICATION FOR INTEGRATED MEASUREMENT MODULE COMMUNICATIONS: CONCEPTS, BEHAVIOR, AND SERVICES (IMMC) |
| SEMI E30.2 : 1998 | HANDLER EQUIPMENT SPECIFIC EQUIPMENT MODEL (HSEM) |
| SEMI E10 : 2014E | SPECIFICATION FOR DEFINITION AND MEASUREMENT OF EQUIPMENT RELIABILITY, AVAILABILITY, AND MAINTAINABILITY (RAM) AND UTILIZATION |
| SEMI E42 : 2004 | RECIPE MANAGEMENT STANDARD: CONCEPTS, BEHAVIOR, AND MESSAGE SERVICES |
| SEMI E41 : 1995 | EXCEPTION MANAGEMENT (EM) STANDARD |
| SEMI E38 : 1996 | CLUSTER TOOL MODULE COMMUNICATIONS (CTMC) |
| SEMI E39 : 2003(R2014) | OBJECT SERVICES STANDARD: CONCEPTS, BEHAVIOUR, AND SERVICES |
| SEMI E53 : 2004 | EVENT REPORTING |
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