SEMI E49.6 : 2003(R2011)
Current
Current
The latest, up-to-date edition.
GUIDE FOR SUBSYSTEM ASSEMBLY AND TESTING PROCEDURES - STAINLESS STEEL SYSTEMS
Published date
01-12-2013
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Ascertains standard guidelines for cleanroom activities specific to the manufacturing, assembly, testing, and integration of materials and components used in stainless steel semiconductor manufacturing equipment.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (11/2003) Not available separately, Published within the SEMI E49 family of standards. (02/2009)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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