NFPA 318 : 2018
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
PROTECTION OF SEMICONDUCTOR FABRICATION FACILITIES
Hardcopy
10-15-2021
English
01-01-2018
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Chapter 1 - Administration
Chapter 2 - Referenced Publications
Chapter 3 - Definitions
Chapter 4 - Building Construction and Related Services
Chapter 5 - Hazardous Materials - General Provisions
Chapter 6 - Liquid Chemical Storage and Handling
Chapter 7 - Gas Storage and Handling
Chapter 8 - Production and Support Equipment
Chapter 9 - Exhaust Systems
Chapter 10 - Waste Treatment
Chapter 11 - Fire Protection
Chapter 12 - General Safety Precautions
Annex A - Explanatory Material
Annex B - Seismic Protection
Annex C - Production and Support Equipment
Annex D - Informational References
Index
Pertains to semiconductor fabrication facilities and comparable R&D areas in which hazardous chemicals are used, stored, and handled - containing a cleanroom or clean zone or both.
| DocumentType |
Standard
|
| Pages |
44
|
| PublisherName |
National Fire Protection Association
|
| Status |
Superseded
|
| SupersededBy | |
| Supersedes |
| NFPA 556 : 2016 | GUIDE ON METHODS FOR EVALUATING FIRE HAZARD TO OCCUPANTS OF PASSENGER ROAD VEHICLES |
| NFPA 204 : 2018 | SMOKE AND HEAT VENTING |
| NFPA 5000 : 2018 | BUILDING CONSTRUCTION AND SAFETY CODE |
| NFPA 556 : 2020 | GUIDE ON METHODS FOR EVALUATING FIRE HAZARD TO OCCUPANTS OF PASSENGER ROAD VEHICLES |
| NFPA 400 : 2016 | HAZARDOUS MATERIALS CODE |
| NFPA 1404 : 2018 | FIRE SERVICE RESPIRATORY PROTECTION TRAINING |
| NFPA 2 : 2016 | HYDROGEN TECHNOLOGIES CODE |
| NFPA 91 : 2015 | EXHAUST SYSTEMS FOR AIR CONVEYING OF VAPORS, GASES, MISTS, AND PARTICULATE SOLIDS |
| NFPA 92B : 2009 | SMOKE MANAGEMENT SYSTEMS IN MALLS, ATRIA, AND LARGE SPACES |
| NFPA 92A : 2009 | SMOKE-CONTROL SYSTEMS UTILIZING BARRIERS AND PRESSURE DIFFERENCES |
| NFPA 1 : 2021 | FIRE CODE |
| NFPA 921 : 2017 | GUIDE FOR FIRE AND EXPLOSION INVESTIGATIONS |
| NFPA 55 : 2016 | COMPRESSED GASES AND CRYOGENIC FLUIDS CODE |
| ICC 2012 INTERNATIONAL FIRE CODE : 2012 | INTERNATIONAL FIRE CODE |
| ICC IFC CODE & COMMENTARY VOLUME 1 & 2 : 2015 | IFC® Code and Commentary |
| NFPA 287 : 2017 | STANDARD TEST METHODS FOR MEASUREMENT OF FLAMMABILITY OF MATERIALS IN CLEANROOMS USING A FIRE PROPAGATION APPARATUS (FPA) |
| NFPA 1 : 2018 | FIRE CODE |
| NFPA 400 : 2019 | Hazardous Materials Code |
| NFPA 13 : 2022 | Standard for the Installation of Sprinkler Systems, 2022 and 2019 Editions |
| ICC IFC International Fire Code:2021 | International Fire Code |
| NFPA 2001 : 2015 | CLEAN AGENT FIRE EXTINGUISHING SYSTEMS |
| NFPA 750 : 2015 | WATER MIST FIRE PROTECTION SYSTEMS |
| UL 2360:1ED 2000-05-10 | Test Methods for Determining the Combustibility Characteristics of Plastics Used in Semi-Conductor Tool Construction |
| FM 4910 : 2013 | CLEANROOM MATERIALS FLAMMABILITY TEST PROTOCOL |
| NFPA 25 : 2017 | INSPECTION, TESTING, AND MAINTENANCE OF WATER-BASED FIRE PROTECTION SYSTEMS |
| CGA G-13 : 2016 | STORAGE AND HANDLING OF SILANE AND SILANE MIXTURES |
| NFPA 287 : 2017 | STANDARD TEST METHODS FOR MEASUREMENT OF FLAMMABILITY OF MATERIALS IN CLEANROOMS USING A FIRE PROPAGATION APPARATUS (FPA) |
| NFPA 329 : 2015 | HANDLING RELEASES OF FLAMMABLE AND COMBUSTIBLE LIQUIDS AND GASES |
| SEMI S2 : 2016B | ENVIRONMENTAL, HEALTH, AND SAFETY GUIDELINE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT |
| NFPA 101 : 2018 | LIFE SAFETY CODE |
| NFPA 79 : 2015 | ELECTRICAL STANDARD FOR INDUSTRIAL MACHINERY |
| UL 900:8ED 2015-04-21 | Air Filter Units |
| NFPA 400 : 2016 | HAZARDOUS MATERIALS CODE |
| NFPA 90A : 2018 | INSTALLATION OF AIR-CONDITIONING AND VENTILATING SYSTEMS |
| ISA 84.01 : 1996 | APPLICATION OF SAFETY INSTRUMENTED SYSTEMS FOR THE PROCESS INDUSTRIES |
| ASME B31.3:2016 | PROCESS PIPING |
| NFPA 5000 : 2018 | BUILDING CONSTRUCTION AND SAFETY CODE |
| FM 4922 : 1994 | FUME EXHAUST DUCTS OR FUME AND SMOKE EXHAUST DUCTS |
| ASME A13.1 : 2015 | SCHEME FOR THE IDENTIFICATION OF PIPING SYSTEMS |
| NFPA 69 : 2014 | EXPLOSION PREVENTION SYSTEMS |
| NFPA 704 : 2017 | STANDARD SYSTEM FOR THE IDENTIFICATION OF THE HAZARDS OF MATERIALS FOR EMERGENCY RESPONSE |
| CFR 49(PTS100-177) : OCT 2017 | TRANSPORTATION |
| IEEE/ASTM SI_10-2010 | American National Standard for Metric Practice |
| SEMI F1 : 2012 | SPECIFICATION FOR LEAK INTEGRITY OF HIGH-PURITY GAS PIPING SYSTEMS AND COMPONENTS |
| NFPA 385 : 2017 | TANK VEHICLES FOR FLAMMABLE AND COMBUSTIBLE LIQUIDS |
| NFPA 68 : 2013 | EXPLOSION PROTECTION BY DEFLAGRATION VENTING |
| NFPA 55 : 2016 | COMPRESSED GASES AND CRYOGENIC FLUIDS CODE |
| ASTM E 136 : 2016-02 | TEST METHOD FOR BEHAVIOUR OF MATERIALS IN A VERTICAL TUBE FURNACE AT 750 DEGREES C |
| NFPA 51B : 2014 | FIRE PREVENTION DURING WELDING, CUTTING, AND OTHER HOT WORK |
| NFPA 70 : 2017 | NATIONAL ELECTRICAL CODE |
| CFR 29(PT1910.1000 TO END) : 0 | LABOR - OCCUPATIONAL SAFETY AND HEALTH ADMINISTRATION, DEPARTMENT OF LABOR |
| NFPA 12 : 2015 | CARBON DIOXIDE EXTINGUISHING SYSTEMS |
| NFPA 1 : 2018 | FIRE CODE |
| ISO 14644-1:2015 | Cleanrooms and associated controlled environments Part 1: Classification of air cleanliness by particle concentration |
| NFPA 72 : 2016 | NATIONAL FIRE ALARM AND SIGNALING CODE |
| NFPA 13 : 2016 | INSTALLATION OF SPRINKLER SYSTEMS |
| NFPA 30 : 2018 | FLAMMABLE AND COMBUSTIBLE LIQUIDS CODE |
| NFPA 1670 : 2017 | OPERATIONS AND TRAINING FOR TECHNICAL SEARCH AND RESCUE INCIDENTS |
| NFPA 37 : 2018 | INSTALLATION AND USE OF STATIONARY COMBUSTION ENGINES AND GAS TURBINES |
| UL 263:14ED 2011-06-21 | Fire Tests of Building Construction and Materials |
| ASME PV CODE SET : 2017 | BOILER AND PRESSURE VESSEL CODE - COMPLETE SET |
| SEMI S14 : 2016 | SAFETY GUIDELINES FOR FIRE RISK ASSESSMENT AND MITIGATION FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT |
| ASTM E 1354 : 2017 : REDLINE | Standard Test Method for Heat and Visible Smoke Release Rates for Materials and Products Using an Oxygen Consumption Calorimeter |
| SEMI S3 : 2011(R2017)E | SAFETY GUIDELINE FOR PROCESS LIQUID HEATING SYSTEMS |
| NFPA 497 : 2017 | CLASSIFICATION OF FLAMMABLE LIQUIDS, GASES, OR VAPORS AND OF HAZARDOUS (CLASSIFIED) LOCATIONS FOR ELECTRICAL INSTALLATIONS IN CHEMICAL PROCESS AREAS |
| NFPA 92 : 2015 | SMOKE CONTROL SYSTEMS |
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