ISO 18115-3:2022
Current
Current
The latest, up-to-date edition.
Surface chemical analysis — Vocabulary — Part 3: Terms used in optical interface analysis
Available format(s)
Hardcopy , PDF , PDF 3 Users , PDF 5 Users , PDF 9 Users
Language(s)
English
Published date
06-30-2022
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This document defines terms for surface chemical analysis in the area of optical interface analysis including ellipsometry, Raman spectroscopy and nonlinear optical techniques as well as general optical terms.
| DocumentType |
Standard
|
| Pages |
35
|
| PublisherName |
International Organization for Standardization
|
| Status |
Current
|
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