IEC/IEEE 62659:2015
Current
The latest, up-to-date edition.
Nanomanufacturing - Large scale manufacturing for nanoelectronics
09-30-2015
FOREWORD
INTRODUCTION
1 Scope
2 Normative references
3 Terms and definitions
4 Abbreviations
5 Nanomaterials incorporation into
electronics fabrication
6 Safety and environmental issues
Bibliography
IEC/IEEE 62659:2015(E) provides a framework for introducing nanoelectronics into large scale, high volume production in semiconductor manufacturing facilities through the incorporation of nanomaterials (e.g. carbon nanotubes, graphene, quantum dots, etc.). Since semiconductor manufacturing facilities need to incorporate practices that maintain high yields, there are very strict requirements for how manufacturing is performed. Nanomaterials represent a potential contaminant in semiconductor manufacturing facilities and need to be introduced in a structured and methodical way.
| DevelopmentNote |
Jointly published by IEC & IEEE. (10/2015)
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| DocumentType |
Standard
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| PublisherName |
International Electrotechnical Committee
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| Status |
Current
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| ISO 14644-6:2007 | Cleanrooms and associated controlled environments Part 6: Vocabulary |
| ISO 14644-8:2013 | Cleanrooms and associated controlled environments Part 8: Classification of air cleanliness by chemical concentration (ACC) |
| ISO/TS 80004-3:2010 | Nanotechnologies Vocabulary Part 3: Carbon nano-objects |
| ISO 14698-2:2003 | Cleanrooms and associated controlled environments Biocontamination control Part 2: Evaluation and interpretation of biocontamination data |
| ISO 14644-2:2015 | Cleanrooms and associated controlled environments Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration |
| ISO/TS 27687:2008 | Nanotechnologies Terminology and definitions for nano-objects Nanoparticle, nanofibre and nanoplate |
| ISO 14644-5:2004 | Cleanrooms and associated controlled environments — Part 5: Operations |
| IEC 62624:2009 | Test methods for measurement of electrical properties of carbon nanotubes |
| ISO 14698-1:2003 | Cleanrooms and associated controlled environments Biocontamination control Part 1: General principles and methods |
| IEC PAS 62565-2-1:2011 | Nanomanufacturing - Material specifications - Part 2-1: Single-wall carbon nanotubes - Blank detail specification |
| ISO 14644-3:2005 | Cleanrooms and associated controlled environments Part 3: Test methods |
| ISO 14644-7:2004 | Cleanrooms and associated controlled environments — Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments) |
| ISO 14644-1:2015 | Cleanrooms and associated controlled environments Part 1: Classification of air cleanliness by particle concentration |
| ISO/TS 80004-1:2015 | Nanotechnologies — Vocabulary — Part 1: Core terms |
| ISO 14644-4:2001 | Cleanrooms and associated controlled environments — Part 4: Design, construction and start-up |
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