BS EN ISO 14644-15:2017
Current
The latest, up-to-date edition.
Cleanrooms and associated controlled environments Assessment of suitability for use of equipment and materials by airborne chemical concentration
Hardcopy , PDF
English
01-11-2018
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Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Symbols
5 Test setup
6 Representative mode
7 Visual inspection
8 Test description
9 Calculation of the measured concentrations
10 Calculation of specific emission rate
11 Assessment
12 Documentation
Annex A (informative) - Example calculation for
suitability assessment of one equipment
(existing installation)
Annex B (informative) - Example calculation for
suitability assessment of wall material
(existing cleanroom/clean zone installation)
Annex C (informative) - Suitability assessment of a
combination of equipment and floor
material in a cleanroom to be designed
Bibliography
Defines requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments which are linked to the ISO standard for cleanliness classes by chemical concentration.
| Committee |
LBI/30
|
| DevelopmentNote |
Supersedes 16/30295652 DC. (01/2018)
|
| DocumentType |
Standard
|
| Pages |
30
|
| PublisherName |
British Standards Institution
|
| Status |
Current
|
This document provides requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments which are linked to the ISO standard for cleanliness classes by chemical concentration (see ISO14644-8).
The following are outside the scope of this document:
-
health and safety requirements;
-
compatibility with cleaning agents and techniques;
-
cleanability;
-
biocontamination;
-
specific requirements of equipment and materials for processes and products;
-
design details of equipment.
| Standards | Relationship |
| EN ISO 14644-15:2017 | Identical |
| ISO 14644-15:2017 | Identical |
| IEST RP CC002 : 1998 | RECOMMENDED PRACTICE FOR LAMINAR FLOW CLEAN AIR DEVICES |
| SAE AIR1167:1970 | ENVIRONMENTAL CRITERIA AND TESTS FOR AEROSPACE GROUND EQUIPMENT IN SUPPORT OF SPACE SYSTEMS |
| ISO 14644-8:2013 | Cleanrooms and associated controlled environments Part 8: Classification of air cleanliness by chemical concentration (ACC) |
| SEMI E49 : 2017 | GUIDE FOR HIGH PURITY AND ULTRAHIGH PURITY PIPING PERFORMANCE, SUBASSEMBLIES, AND FINAL ASSEMBLIES |
| IEST RP CC026.2 : 2004 | CLEANROOM OPERATIONS |
| ISO 8573-8:2004 | Compressed air — Part 8: Test methods for solid particle content by mass concentration |
| SEMI F70 : 2011(R2017) | TEST METHOD FOR DETERMINATION OF PARTICLE CONTRIBUTION OF GAS DELIVERY SYSTEM |
| ISO 14644-14:2016 | Cleanrooms and associated controlled environments Part 14: Assessment of suitability for use of equipment by airborne particle concentration |
| ISO 2889:2010 | Sampling airborne radioactive materials from the stacks and ducts of nuclear facilities |
| IEST RP CC013 : 86-T | EQUIPMENT CALIBRATION OR VALIDATION PROCEDURES |
| ISO 16000-9:2006 | Indoor air — Part 9: Determination of the emission of volatile organic compounds from building products and furnishing — Emission test chamber method |
| ISO 14644-1:2015 | Cleanrooms and associated controlled environments Part 1: Classification of air cleanliness by particle concentration |
| VDI 2083 Blatt 9.1:2006-12 | Clean room technology - Compatibility with required cleanliness and surface cleanliness |
| ISO 16000-6:2011 | Indoor air Part 6: Determination of volatile organic compounds in indoor and test chamber air by active sampling on Tenax TA sorbent, thermal desorption and gas chromatography using MS or MS-FID |
| SEMI F28 : 2003(R2015) | TEST METHOD FOR MEASURING PARTICLE GENERATION FROM PROCESS PANELS |
| IEST RP CC028.1 : 2002 |
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