ASTM D 5544 : 2016
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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Standard Test Method for On-Line Measurement of Residue After Evaporation of High-Purity Water
Hardcopy , PDF
12-07-2023
English
07-14-2016
Important note : All end users must be registered with an Account prior to user licenses being assigned.This test method covers the determination of dissolved organic and inorganic matter and colloidal material found in high-purity water used in the semiconductor, and related industries.
| Committee |
D 19
|
| DocumentType |
Test Method
|
| Pages |
9
|
| PublisherName |
American Society for Testing and Materials
|
| Status |
Superseded
|
| SupersededBy | |
| Supersedes |
1.1This test method covers the determination of dissolved organic and inorganic matter and colloidal material found in high-purity water used in the semiconductor, and related industries. This material is referred to as residue after evaporation (RAE). The range of the test method is from 0.001 μg/L (ppb) to 60 μg/L (ppb).
1.2This test method uses a continuous, real time monitoring technique to measure the concentration of RAE. A pressurized sample of high-purity water is supplied to the test method's apparatus continuously through ultra-clean fittings and tubing. Contaminants from the atmosphere are therefore prevented from entering the sample. General information on the test method and a literature review on the continuous measurement of RAE has been published.2
1.3The values stated in SI units are to be regarded as standard. The values given in parentheses are mathematical conversions to inch-pound units that are provided for information only and are not considered standard.
1.4This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. For specific hazards statements, see Section 8.
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| ASTM D 2777 : 1998 | Standard Practice for Determination of Precision and Bias of Applicable Methods of Committee D-19 on Water |
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| ASTM D 1129 : 2003 : REV A | Standard Terminology Relating to Water |
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| ASTM E 1184 : 2010 | Standard Practice for Determination of Elements by Graphite Furnace Atomic Absorption Spectrometry |
| ASTM D 3919 : 2008 | Standard Practice for Measuring Trace Elements in Water by Graphite Furnace Atomic Absorption Spectrophotometry |
| ASTM D 5127 : 2012 | Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries |
| ASTM D 1129 : 2004 | Standard Terminology Relating to Water |
| ASTM D 2777 : 2008 | Standard Practice for Determination of Precision and Bias of Applicable Test Methods of Committee D19 on Water |
| ASTM D 2777 : 2006 | Standard Practice for Determination of Precision and Bias of Applicable Test Methods of Committee D19 on Water |
| ASTM D 3370 : 2018 | Standard Practices for Sampling Water from Flowing Process Streams |
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| ASTM D 3919 : 1999 | Standard Practice for Measuring Trace Elements in Water by Graphite Furnace Atomic Absorption Spectrophotometry |
| ASTM D 3370 : 1976 | Standard Practices for Sampling Water |
| ASTM D 3864 : 2012 | Standard Guide for On-Line Monitoring Systems for Water Analysis |
| ASTM D 3370 : 1995 : REV A : R1999 : EDT 1 | Standard Practices for Sampling Water from Closed Conduits |
| ASTM D 1129 : 2010 | Standard Terminology Relating to Water |
| ASTM D 5127 : 1999 | Standard Guide for Ultra Pure Water Used in the Electronics and Semiconductor Industry |
| ASTM D 3370 : 2007 | Standard Practices for Sampling Water from Closed Conduits |
| ASTM D 1129 : 2006 : REV A : EDT 1 | Standard Terminology Relating to Water |
| ASTM D 5127 : 2013 : R2018 | Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries |
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| ASTM D 1129 : 2004 : EDT 1 | Standard Terminology Relating to Water |
| ASTM D 2777 : 2008 : EDT 1 | Standard Practice for Determination of Precision and Bias of Applicable Test Methods of Committee D19 on Water |
| ASTM D 3864 : 1996 : R2000 | Standard Guide for Continual On-Line Monitoring Systems for Water Analysis |
| ASTM E 1184 : 1998 | Standard Practice for Electrothermal (Graphite Furnace) Atomic Absorption Analysis |
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