ASTM D 5544 : 1994 : R1999 : EDT 1
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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Standard Test Method for On-Line Measurement of Residue After Evaporation of High-Purity Water
Hardcopy , PDF
11-11-2014
English
06-10-1999
Important note : All end users must be registered with an Account prior to user licenses being assigned.| Committee |
D 19
|
| DocumentType |
Test Method
|
| Pages |
9
|
| ProductNote |
Reconfirmed EDT 1
|
| PublisherName |
American Society for Testing and Materials
|
| Status |
Superseded
|
| SupersededBy |
1.1 This test method covers the determination of dissolved organic and inorganic matter and colloidal material found in high-purity water used in the semiconductor, aerospace, and other industries. This material is referred to as residue after evaporation (RAE). The range of the test method is from 0.1 [mu]g/L(ppb) to 20 mg/L (ppm).
1.2 This test method uses a continuous, real time monitoring technique to measure the concentration of RAE. A pressurized sample of high-purity water is supplied to the test method's apparatus continuously through ultra-clean fittings and tubing. Contaminants from the atmosphere are therefore prevented from entering the sample. General information on the test method and a literature review on the continuous measurement of RAE has been published.
1.3 The values stated in SI units are to be regarded as the standard. The values given in parentheses are for information only.
1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. For specific hazards statements, see Section 8.
| ASTM D 5127 : 2013 : R2018 | Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries |
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