ASTM D 5127 : 2013
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries
Hardcopy , PDF
09-02-2020
English
01-01-2013
Important note : All end users must be registered with an Account prior to user licenses being assigned.| Committee |
D 19
|
| DocumentType |
Guide
|
| Pages |
6
|
| PublisherName |
American Society for Testing and Materials
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| Status |
Superseded
|
| SupersededBy | |
| Supersedes |
1.1This guide provides recommendations for water quality related to electronics and semiconductor-industry manufacturing. Seven classifications of water are described, including water for line widths as low as 0.032 micron. In all cases, the recommendations are for water at the point of distribution (POD).
1.2Water is used for washing and rinsing of semiconductor components during manufacture. Water is also used for cleaning and etching operations, making steam for oxidation of silicon surfaces, preparing photomasks, and depositing luminescent materials. Other applications are in the development and fabrication of solid-state devices, thin-film devices, communication lasers, light-emitting diodes, photo-detectors, printed circuits, memory devices, vacuum-tube devices, or electrolytic devices.
| ASTM D 5196 : 2006 : R2018 | Standard Guide for Bio-Applications Grade Water |
| ASTM D 5544 : 2016 | Standard Test Method for On-Line Measurement of Residue After Evaporation of High-Purity Water |
| ASTM D 7980 : 2015 | Standard Guide for Ion-Chromatographic Analysis of Anions in Grab Samples of Ultrapure Water (UPW) in the Semiconductor Industry |
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