11/30199166 DC : 0
Current
The latest, up-to-date edition.
BS ISO 11952 - SURFACE CHEMICAL ANALYSIS - SCANNING PROBE MICROSCOPY - DETERMINATION OF GEOMETRIC QUANTITIES USING SPM - CALIBRATION OF MEASURING SYSTEMS
Hardcopy , PDF
English
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1 Scope
2 Normative references, terms and definitions
3 Symbols
4 Characteristics of scanning probe microscopes
5 Preliminary characterization of the measuring system
6 Calibration
7 Report of calibration results
8 Uncertainties of measurement
9 Report of results (form)
Annex A (informative) - Exemplary superposition of
disturbing influences in the topography
Annex B (informative) - Sound investigations: Effects
of a sound proofing hood
Annex C (informative) - Thermal isolation effect of a
sound proofing hood/measuring cabin
Annex D (informative) - Control parameters and scan
speed; handling of contaminations
Annex E (informative) - Step height determination:
comparison histogram and ISO 5436 method
Annex F (normative) - Uncertainty of measurement for
lateral measurands
Bibliography
BS ISO 11952
| Committee |
CII/60
|
| DocumentType |
Draft
|
| Pages |
58
|
| PublisherName |
British Standards Institution
|
| Status |
Current
|
| ISO 12179:2000 | Geometrical Product Specifications (GPS) Surface texture: Profile method Calibration of contact (stylus) instruments |
| ISO 4287:1997 | Geometrical Product Specifications (GPS) — Surface texture: Profile method — Terms, definitions and surface texture parameters |
| ISO Guide 30:2015 | Reference materials — Selected terms and definitions |
| ISO 3274:1996 | Geometrical Product Specifications (GPS) — Surface texture: Profile method — Nominal characteristics of contact (stylus) instruments |
| ISO 12853:2015 | Microscopes Information provided to the user |
| ISO 5436-1:2000 | Geometrical Product Specifications (GPS) — Surface texture: Profile method; Measurement standards — Part 1: Material measures |
| ISO 18115-2:2013 | Surface chemical analysis Vocabulary Part 2: Terms used in scanning-probe microscopy |
| ISO 13095:2014 | Surface Chemical Analysis Atomic force microscopy Procedure for in situ characterization of AFM probe shank profile used for nanostructure measurement |
| ISO 11775:2015 | Surface chemical analysis — Scanning-probe microscopy — Determination of cantilever normal spring constants |
| ISO Guide 34:2009 | General requirements for the competence of reference material producers |
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