SEMI C47 : 2012
Current
Current
The latest, up-to-date edition.
GUIDE FOR TRANS 1,2 DICHLOROETHYLENE
Published date
12-01-2013
Specifies a guide for a grade of trans 1,2 dichloroethylene for which a need has been identified.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001) Supersedes SEMI C7.20. (03/2005)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| Supersedes |
| I.S. EN 16603-35-06:2014 | SPACE ENGINEERING - CLEANLINESS REQUIREMENTS FOR SPACECRAFT PROPULSION HARDWARE |
| BS EN 16603-35-06:2014 | Space engineering. Cleanliness requirements for spacecraft propulsion hardware |
| EN 16603-35-06:2014 | Space engineering - Cleanliness requirements for spacecraft propulsion hardware |
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