VDI 2083 Blatt 9.1:2006-12
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
Clean room technology - Compatibility with required cleanliness and surface cleanliness
Hardcopy , PDF
04-01-2021
German - English
01-12-2006
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Preliminary note
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Classification
5 Requirements
6 Procedure for testing and
acceptance, metrology
7 Documentation
Annex A - Case study illustrating the
procedure for reducing the number of
measuring points
(representative inference)
Annex B - Example of calculation for determining
the cleanroom compatibility deriving
from measurements
Annex C - Methods for determining the
compatibility with the required
cleanliness
Annex D - Indirect method for determining the
challenge to the cleanroom (holistic
method)
Annex E - Special tests for surface cleanliness
and compatibility with the required
cleanliness for the cleanroom trades
Bibliography
Provides guidance in the planning, creating, maintaining, restoring and demonstrating of the required compatibility of equipment and air-handling components with the required cleanliness in controlled environments as per VDI 2083 Part 1 and ISO 14644-1.
| DevelopmentNote |
Supersedes VDI 2083-4 and VDI 2083-8. (12/2007)
|
| DocumentType |
Standard
|
| Pages |
60
|
| PublisherName |
Verlag des Vereins Deutscher Ingenieure
|
| Status |
Superseded
|
| SupersededBy | |
| Supersedes |
| VDI 2083 Blatt 4:1996-02 | Cleanroom technology - Surface cleanliness |
| UNE-EN ISO 14644-14:2017 | Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration (ISO 14644-14:2016) |
| EN ISO 14644-14:2016 | Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration (ISO 14644-14:2016) |
| EN ISO 14644-15:2017 | Cleanrooms and associated controlled environments - Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration (ISO 14644-15:2017) |
| VDI 2083 Blatt 18:2012-01 | Cleanroom technology - Biocontamination control |
| VDI 2083 Blatt 17:2013-06 | Cleanroom technology - Compatibility of materials with the required cleanliness |
| VDI 2083 Blatt 15:2007-04 | Cleanroom technology - Personnel at the clean work place |
| VDI 2083 Blatt 13.3:2010-10 | Cleanroom technology - Quality, production, and distribution of ultrapure water - Pharmacy and other life-science applications |
| BS EN ISO 14644-15:2017 | Cleanrooms and associated controlled environments Assessment of suitability for use of equipment and materials by airborne chemical concentration |
| VDI 2083 Blatt 9.2:2017-01 | Cleanroom technology - Consumables in the cleanroom |
| VDI 2083 Blatt 8.1:2014-10 | Cleanroom technology - Air cleanliness chemical concentration (ACC) |
| ISO 14644-15:2017 | Cleanrooms and associated controlled environments — Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration |
| VDI 2083 Blatt 1:2013-01 | Cleanroom technology - Particulate air cleanliness classes |
| BS EN ISO 14644-14:2016 | ENISO 14644-14 environments — Assessment of suitability of equipment and materials for cleanrooms Assessment of suitability for use of equipment by airborne particle concentration |
| ISO 14644-14:2016 | Cleanrooms and associated controlled environments Part 14: Assessment of suitability for use of equipment by airborne particle concentration |
| VDI 2083 Blatt 16.1:2010-08 | Cleanroom technology - Barier systems (isolators, mini-environments, separative devices) - Effectiveness and certification |
| EN ISO 14644-4:2001 | Cleanrooms and associated controlled environments - Part 4: Design, construction and start-up (ISO 14644-4:2001) |
| ISO 9241-5:1998 | Ergonomic requirements for office work with visual display terminals (VDTs) — Part 5: Workstation layout and postural requirements |
| ISO 4287:1997 | Geometrical Product Specifications (GPS) — Surface texture: Profile method — Terms, definitions and surface texture parameters |
| EN 61340-5-1:2016/AC:2017-05 | ELECTROSTATICS - PART 5-1: PROTECTION OF ELECTRONIC DEVICES FROM ELECTROSTATIC PHENOMENA - GENERAL REQUIREMENTS (IEC 61340-5-1:2016/COR1:2017) |
| VDI 2083 Blatt 3:2005-07 | Cleanroom technology - Metrology and test methods |
| DIN EN 1335-2:2016-09 (Draft) | OFFICE FURNITURE - OFFICE WORK CHAIR - PART 2: SAFETY REQUIREMENTS |
| IEC 61340-5-1:2016 | Electrostatics - Part 5-1: Protection of electronic devices from electrostatic phenomena - General requirements |
| VDI 2083 Blatt 10:1998-02 | Cleanroom technology - High-Purity/Ultra-High-Purity (HP-/UHP-)media supply systems |
| DIN EN 61340-5-2 : 2002 | ELECTROSTATICS - PART 5-2: PROTECTION OF ELECTRONIC DEVICES FROM ELECTROSTATIC PHENOMENA; USER GUIDE |
| DIN EN 1335-1:2002-08 | OFFICE FURNITURE - OFFICE WORK CHAIR - PART 1: DIMENSIONS - DETERMINATION OF DIMENSIONS |
| EN ISO 8785:1999 | Geometrical product specification (GPS) - Surface imperfections - Terms, definitions and parameters (ISO 8785:1998) |
| DIN EN ISO 9241-5:1999-08 | ERGONOMIC REQUIREMENTS FOR OFFICE WORK WITH VISUAL DISPLAY TERMINALS (VDTS) - PART 5: WORKSTATION LAYOUT AND POSTURAL REQUIREMENTS |
| DIN EN ISO 14644-4:2003-06 | Cleanrooms and associated controlled environments - Part 4: Design, construction and start up (ISO 14644-4:2001) |
| VDI 2815 Blatt 5:1978-05 | Terms of production engineering and control; manufacturing accessories |
| SEMI E14 : 1993 | MEASUREMENT OF PARTICLE CONTAMINATION CONTRIBUTED TO THE PRODUCT FROM THE PROCESS OR SUPPORT TOOL |
| DIN 55301:1978-09 | PRESENTATION OF STATISTICAL TABLES |
| PREN ISO 14644-8 : DRAFT 2011 | CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 8: CLASSIFICATION OF AIR CLEANLINESS BY CHEMICAL CONCENTRATION (ISO/DIS 14644-8:2011) |
| DIN EN 61340-5-1 : 2017 | ELECTROSTATICS - PART 5-1: PROTECTION OF ELECTRONIC DEVICES FROM ELECTROSTATIC PHENOMENA - GENERAL REQUIREMENTS (IEC 61340-5-1:2016) |
| DIN EN 1081:1998-04 | RESILIENT FLOOR COVERINGS - DETERMINATION OF THE ELECTRICAL RESISTANCE |
| VDI 3489 Blatt 3:1997-03 | Particulate matter measurement - Methods of characterizing and monitoring test aerosols - Optical particle counter |
| ASTM G 99 : 2017 : REDLINE | Standard Test Method for Wear Testing with a Pin-on-Disk Apparatus |
| ISO 14644-7:2004 | Cleanrooms and associated controlled environments — Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments) |
| EN 1335-1 : 2000 COR 2002 | OFFICE FURNITURE - OFFICE WORK CHAIR - PART 1: DIMENSIONS - DETERMINATION OF DIMENSIONS |
| VDI 2083 Blatt 7:2015-10 | Cleanroom technology - Ultrapure media - Quality, supply, distribution |
| ISO 8785:1998 | Geometrical Product Specification (GPS) — Surface imperfections — Terms, definitions and parameters |
| EN 1335-2:2009 | Office furniture - Office work chair - Part 2: Safety requirements |
| ISO 14644-4:2001 | Cleanrooms and associated controlled environments — Part 4: Design, construction and start-up |
| EN 61340-5-2:2001/corrigendum:2001 | ELECTROSTATICS - PART 5-2: PROTECTION OF ELECTRONIC DEVICES FROM ELECTROSTATIC PHENOMENA - USER GUIDE |
| EN 13779:2007 | Ventilation for non-residential buildings - Performance requirements for ventilation and room-conditioning systems |
| VDI 2083 Blatt 9:1991-09 (Draft) | Clean room engineering; quality, production and distribution of superpurity water |
| EN 1081:1998 | Resilient floor coverings - Determination of the electrical resistance |
| DIN 50452-1:1995-11 | TESTING OF MATERIALS FOR SEMICONDUCTOR TECHNOLOGY - TEST METHOD FOR PARTICLE ANALYSIS IN LIQUIDS - PART 1: MICROSCOPIC DETERMINATION OF PARTICLES |
| EN ISO 14644-7:2004 | Cleanrooms and associated controlled environments - Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments) (ISO 14644-7:2004) |
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