VDI 2083 Blatt 13.2:2009-01
Current
Current
The latest, up-to-date edition.
Cleanroom technology - Quality, production and distribution of ultrapure water - Microelectronics and other technical applications
Available format(s)
Hardcopy , PDF
Language(s)
German - English
Published date
01-01-2009
Publisher
Important note : All end users must be registered with an Account prior to user licenses being assigned.
Preliminary note
Introduction
1. Scope
2. Normative references
3. Terms and definitions
4. Raw water
5. Basic operations of ultrapure-water production
6. Specification of ultrapure water for the
microelectronics industry
7. Typical plant layouts (including materials and
components)
8. Ultrapure-water distribution
9. Installation, commissioning and acceptance
10. Project handling and documentation
11. Operation and quality monitoring
12. Reuse
Bibliography
Index
This guideline aims to compile the existing expertise regarding the planning, construction, operation and monitoring of water-processing installations for the production of ultrapure water.
| DocumentType |
Standard
|
| Pages |
52
|
| PublisherName |
Verlag des Vereins Deutscher Ingenieure
|
| Status |
Current
|
| Supersedes |
| VDI 2083 Blatt 17:2013-06 | Cleanroom technology - Compatibility of materials with the required cleanliness |
| VDI 2083 Blatt 3.1:2012-06 | Cleanroom technology - Metrology in cleanroom air - Monitoring |
| VDI 2083 Blatt 13.3:2010-10 | Cleanroom technology - Quality, production, and distribution of ultrapure water - Pharmacy and other life-science applications |
| VDI 2083 Blatt 8.1:2014-10 | Cleanroom technology - Air cleanliness chemical concentration (ACC) |
| VDI 2083 Blatt 1:2013-01 | Cleanroom technology - Particulate air cleanliness classes |
| VDI 2083 Blatt 4.2:2011-04 | Cleanroom technology - Energy efficiency |
| VDI 2083 Blatt 13.1:2009-01 | Cleanroom technology - Quality, production and distribution of ultrapure water - Fundamentals |
| VDI 2083 Blatt 16.1:2010-08 | Cleanroom technology - Barier systems (isolators, mini-environments, separative devices) - Effectiveness and certification |
| VDI 2083 Blatt 7:2015-10 | Cleanroom technology - Ultrapure media - Quality, supply, distribution |
| EN ISO 6520-1:2007 | Welding and allied processes - Classification of geometric imperfections in metallic materials - Part 1: Fusion welding (ISO 6520-1:2007) |
| EN ISO 5817:2014 | Welding - Fusion-welded joints in steel, nickel, titanium and their alloys (beam welding excluded) - Quality levels for imperfections (ISO 5817:2014) |
| DIN EN ISO 14644-1:2016-06 | CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 1: CLASSIFICATION OF AIR CLEANLINESS BY PARTICLE CONCENTRATION (ISO 14644-1:2015) |
| DIN 11850:2009-02 | STAINLESS STEEL TUBES FOR THE FOOD AND CHEMICAL INDUSTRIES - DIMENSIONS, MATERIALS |
| DIN 4046:1983-09 | WATER-SUPPLY - TERMS - DVGW CODE OF PRACTICE |
| VDI 2083 Blatt 11:2008-01 | Cleanroom technology - Quality assurance |
| DIN 25416-2:1983-01 | FACILITIES FOR TREATMENT FOR RADIOACTIVE CONTAMINATED WATER IN NUCLEAR POWER PLANTS - METHODS |
| DIN 11864-1:2016-10 (Draft) | STAINLESS STEEL COMPONENTS FOR ASEPTIC APPLICATIONS IN THE CHEMICAL AND THE PHARMACEUTICAL INDUSTRIES - PART 1: CONNECTIONS |
| ISO 6520-1:2007 | Welding and allied processes Classification of geometric imperfections in metallic materials Part 1: Fusion welding |
| ISO 14160:2011 | Sterilization of health care products Liquid chemical sterilizing agents for single-use medical devices utilizing animal tissues and their derivatives Requirements for characterization, development, validation and routine control of a sterilization process for medical devices |
| EN 12829:2011 | Surface active agents - Preparation of water with known calcium and magnesium hardness |
| DIN 1314:1977-02 | PRESSURE; BASIC CONCEPTS, UNITS |
| VDI 2083 Blatt 3:2005-07 | Cleanroom technology - Metrology and test methods |
| VDI 2083 Blatt 1:2013-01 | Cleanroom technology - Particulate air cleanliness classes |
| EN ISO 7027:1999 | Water quality - Determination of turbidity (ISO 7027:1999) |
| SEMI E75 : 1998 | PROVISIONAL MECHANICAL SPECIFICATION FOR BOX/POD COMPATIBLE CASSETTES USED TO TRANSPORT AND STORE 300-MM WAFERS |
| VDI 2083 Blatt 10:1998-02 | Cleanroom technology - High-Purity/Ultra-High-Purity (HP-/UHP-)media supply systems |
| DIN EN ISO 17664:2016-06 (Draft) | PROCESSING OF HEALTH CARE PRODUCTS - INFORMATION TO BE PROVIDED BY THE MEDICAL DEVICE MANUFACTURER FOR THE PROCESSING OF MEDICAL DEVICES (ISO 17664:2017) |
| DIN 54400:2015-05 | ION EXCHANGE - TERMINOLOGY |
| ISO 2174:1990 | Surface active agents Preparation of water with known calcium hardness |
| ISO 14644-5:2004 | Cleanrooms and associated controlled environments — Part 5: Operations |
| EN 14743:2005+A1:2007 | Water conditioning equipment inside buildings - Softeners - Requirements for performance, safety and testing |
| VDI 2083 Blatt 12:2000-01 | Cleanroom technology - Safety and environmental aspects |
| VDI 2083 Blatt 13.1:2009-01 | Cleanroom technology - Quality, production and distribution of ultrapure water - Fundamentals |
| DIN EN 12829:2011-07 | Surface active agents - Preparation of water with known calcium and magnesium hardness |
| EN 1717:2000 | Protection against pollution of potable water in water installations and general requirements of devices to prevent pollution by backflow |
| EN ISO 4833:2003 | Microbiology of food and animal feeding stuffs - Horizontal method for the enumeration of microorganisms - Colony-count technique at 30 degrees C (ISO 4833:2003) |
| VDI 2083 Blatt 4.1:2006-10 | Cleanroom technology - Planning, construction and start-up of cleanrooms |
| VDI 2083 Blatt 15:2007-04 | Cleanroom technology - Personnel at the clean work place |
| ISO 10931:2005 | Plastics piping systems for industrial applications Poly(vinylidene fluoride) (PVDF) Specifications for components and the system |
| DIN 11864-2:2016-10 (Draft) | STAINLESS STEEL COMPONENTS FOR ASEPTIC APPLICATIONS IN THE CHEMICAL AND THE PHARMACEUTICAL INDUSTRIES - PART 2: FLANGE CONNECTIONS |
| DIN 38404-3:2005-07 | German standard methods for the examination of water, waste water and sludge - Physical and physical-chemical parameters (group C) - Part 3: Determination of spectral absorption in the UV range, spectral absorption coefficient (C 3) |
| SEMI E49.3 : 1998 | GUIDE FOR ULTRAHIGH PURITY DEIONIZED WATER AND CHEMICAL DISTRIBUTION SYSTEMS IN SEMICONDUCTOR MANUFACTURING EQUIPMENT |
| DIN EN 14743:2007-09 | WATER CONDITIONING EQUIPMENT INSIDE BUILDINGS - SOFTENERS - REQUIREMENTS FOR PERFORMANCE, SAFETY AND TESTING |
| VDI 1000:2017-02 | VDI Standardisation Work - Principles and procedures |
| EN 13098:2000 | Workplace atmosphere - Guidelines for measurement of airborne micro-organisms and endotoxin |
| DIN EN 10204:2005-01 | Metallic products - Types of inspection documents; German version EN 10204:2004 |
| DIN 32736:2000-08 | Building Management - Definitions and scope of services |
| DIN 32676:2009-05 | Fittings for the food, chemical and pharmaceutical industries - Clamp connections for stainless steel tubes - Weld-on type |
| EN ISO 14644-5:2004 | Cleanrooms and associated controlled environments - Part 5: Operations (ISO 14644-5:2004) |
| EN 14652:2005+A1:2007 | Water conditioning equipment inside buildings - Membrane separation devices - Requirements for performance, safety and testing |
| VDI 2083 Blatt 5.1:2007-09 | Cleanroom technology - Cleanroom operation |
| DIN EN ISO 7027:2000-04 | WATER QUALITY - DETERMINATION OF TURBIDITY |
| EN 10204:2004 | Metallic products - Types of inspection documents |
| ISO 14644-1:2015 | Cleanrooms and associated controlled environments Part 1: Classification of air cleanliness by particle concentration |
| VDI 2083 Blatt 7:2015-10 | Cleanroom technology - Ultrapure media - Quality, supply, distribution |
| DIN 38404-10:2012-12 | GERMAN STANDARD METHODS FOR THE EXAMINATION OF WATER, WASTE WATER AND SLUDGE - PHYSICAL AND PHYSICO-CHEMICAL PARAMETERS (GROUP C) - PART 10: CALCULATION OF THE CALCIT SATURATION OF WATER (C 10) |
| DIN EN ISO 14160:2011-10 | Sterilization of health care products - Liquid chemical sterilizing agents for single-use medical devices utilizing animal tissues and their derivatives - Requirements for characterization, development, validation and routine control of a sterilization process for medical devices (ISO 14160:2011) |
| VDI 2083 Blatt 9:1991-09 (Draft) | Clean room engineering; quality, production and distribution of superpurity water |
| VDI 2083 Blatt 5.2:2008-10 | Cleanroom technology - Cleanroom operation - Decontamination of multiple-use cleanroom clothing |
| EN 1418:1997 | Welding personnel - Approval testing of welding operators for fusion welding and resistance weld setters for fully mechanized and automatic welding of metallic materials |
| DIN EN ISO 10931:2015-11 | PLASTICS PIPING SYSTEMS FOR INDUSTRIAL APPLICATIONS - POLY(VINYLIDENE FLUORIDE) (PVDF) - SPECIFICATIONS FOR COMPONENTS AND THE SYSTEM (ISO 10931:2005 + AMD 1:2015) |
| EN ISO 14644-1:2015 | Cleanrooms and associated controlled environments - Part 1: Classification of air cleanliness by particle concentration (ISO 14644-1:2015) |
| ISO 17664:2017 | Processing of health care products Information to be provided by the medical device manufacturer for the processing of medical devices |
| EN ISO 14160:2011 | Sterilization of health care products - Liquid chemical sterilizing agents for single-use medical devices utilizing animal tissues and their derivatives - Requirements for characterization, development, validation and routine control of a sterilization process for medical devices (ISO 14160:2011) |
| DIN EN 1717:2011-08 | Protection against pollution of potable water installations and general requirements of devices to prevent pollution by backflow |
| ISO 7027:1999 | Water quality Determination of turbidity |
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