SEMI PV81 : 2018
Current
Current
The latest, up-to-date edition.
GUIDE FOR SPECIFYING LOW PRESSURE HORIZONTAL DIFFUSION FURNACE
Published date
24-04-2018
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Describes several key parameters which influence the diffusion process results in low pressure.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (04/2018)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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