SEMI F81 : 2011(R2017)
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR VISUAL INSPECTION AND ACCEPTANCE OF GAS TUNGSTEN ARC (GTA) WELDS IN FLUID DISTRIBUTION SYSTEMS IN SEMICONDUCTOR MANUFACTURING APPLICATIONS
Published date
12-01-2013
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Gives visual inspection and acceptance criteria for gas tungsten arc (GTA) welds of stainless steel and other corrosion resistant metals and alloys (CRAs) in fluid (liquid or gas) distribution systems in semiconductor manufacturing applications.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (12/2003)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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| SEMI E49.5 : 2004 | GUIDE FOR ULTRAHIGH PURITY SOLVENT DISTRIBUTION SYSTEMS IN SEMICONDUCTOR MANUFACTURING EQUIPMENT |
| SEMI E49.8 : 2003(R2011) | GUIDE FOR HIGH PURITY AND ULTRAHIGH PURITY GAS DISTRIBUTION SYSTEMS IN SEMICONDUCTOR MANUFACTURING EQUIPMENT |
| SEMI E49.6 : 2003(R2011) | GUIDE FOR SUBSYSTEM ASSEMBLY AND TESTING PROCEDURES - STAINLESS STEEL SYSTEMS |
| SEMI F78 : 2011(R2017) | PRACTICE FOR GAS TUNGSTEN ARC (GTA) WELDING OF FLUID DISTRIBUTION SYSTEMS IN SEMICONDUCTOR MANUFACTURING APPLICATIONS |
| SEMI F78 : 2011(R2017) | PRACTICE FOR GAS TUNGSTEN ARC (GTA) WELDING OF FLUID DISTRIBUTION SYSTEMS IN SEMICONDUCTOR MANUFACTURING APPLICATIONS |
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