SEMI C3.42 : 1990
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
PROVISIONAL STANDARD FOR ARGON (AR), VLSI GRADE, BULK
01-03-2005
12-01-2013
Suppliers recognizing the importance of impurity content of gases in the manufacture of semiconductors, responded by introducing products with advanced analytical characterization, notably for trace impurities. The following criteria was considered when determining the defined analytical method: Ease of Use; Accuracy; Maintenance; Sensitivity; Versatility; Precision; Reliability; and Availability of Equipment. Specification is specific to Argon (Ar), VLSI Grade Bulk - used in the processing and manufacture of semiconductors and advanced electronic circuits and devices. Gas complying with the specifications will commonly contain more of the major component than the minimum permissible limit or contain less of an impurity (or several impurities) than the SEMI C3 maximum permissible limit.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
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| SupersededBy |
| SEMI MF1723 : 2004 | PRACTICE FOR EVALUATION OF POLYCRYSTALLINE SILICON RODS BY FLOAT-ZONE CRYSTAL GROWTH AND SPECTROSCOPY |
| SEMI E49.6 : 2003(R2011) | GUIDE FOR SUBSYSTEM ASSEMBLY AND TESTING PROCEDURES - STAINLESS STEEL SYSTEMS |
| SEMI MF1708 : 2004 | PRACTICE FOR EVALUATION OF GRANULAR POLYSILICON BY MELTER-ZONER SPECTROSCOPIES |
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