ISO 13083:2015
Current
The latest, up-to-date edition.
Surface chemical analysis — Scanning probe microscopy — Standards on the definition and calibration of spatial resolution of electrical scanning probe microscopes (ESPMs) such as SSRM and SCM for 2D-dopant imaging and other purposes
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English
20-08-2015
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ISO 13083:2015 describes a method for measuring the spatial (lateral) resolution of scanning capacitance microscopes (SCMs) or scanning spreading resistance microscopes (SSRMs), which are widely used in imaging the distribution of carriers and other electrical properties in semiconductor devices. The method involves the use of a sharp-edged artefact.
| DevelopmentNote |
Supersedes ISO/DIS 13083. (08/2015)
|
| DocumentType |
Standard
|
| Pages |
14
|
| PublisherName |
International Organization for Standardization
|
| Status |
Current
|
| Standards | Relationship |
| BS ISO 13083:2015 | Identical |
| ISO 18516:2006 | Surface chemical analysis Auger electron spectroscopy and X-ray photoelectron spectroscopy Determination of lateral resolution |
| ISO 18115-2:2013 | Surface chemical analysis Vocabulary Part 2: Terms used in scanning-probe microscopy |
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