BS EN 62047-1:2016
Current
The latest, up-to-date edition.
Semiconductor devices. Micro-electromechanical devices Terms and definitions
Hardcopy , PDF
English
30-04-2016
Important note : All end users must be registered with an Account prior to user licenses being assigned.| Committee |
EPL/47
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| DevelopmentNote |
Supersedes 03/107914 DC. (09/2006) Supersedes 13/30293217 DC. (04/2016)
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| DocumentType |
Standard
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| Pages |
38
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| PublisherName |
British Standards Institution
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| Status |
Current
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| Supersedes |
IEC 62047-1:2016 defines terms for micro-electromechanical devices including the process of production of such devices. This edition includes the following significant technical changes with respect to the previous edition:
a) removal of ten terms;
b) revision of twelve terms;
c) addition of sixteen new terms.
| Standards | Relationship |
| I.S. EN 62047-1:2016 | Identical |
| NF EN 62047-1 : 2016 | Identical |
| SN EN 62047-1:2016 | Identical |
| DIN EN 62047-1:2014-05 (Draft) | Identical |
| EN 62047-1:2016 | Identical |
| NBN EN 62047-1 : 2016 | Identical |
| IEC 62047-1:2016 | Identical |
| IEC 61988-2-3:2009 | Identical |
| EN 61988-2-3:2009 | Identical |
| IEC 60050-815:2015 | International Electrotechnical Vocabulary (IEV) - Part 815: Superconductivity |
| ISO 2041:2009 | Mechanical vibration, shock and condition monitoring Vocabulary |
| IEC 62047-1:2016 | Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions |
| IEC 60050-521:2002 | International Electrotechnical Vocabulary (IEV) - Part 521: Semiconductor devices and integrated circuits |
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