ASTM F 66 : 1984 : R1990
Withdrawn
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
Test Methods for Testing Photoresists Used in Microelectronic Fabrication (Withdrawn 1996)
Withdrawn date
01-10-1996
Published date
31-12-2010
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CONTAINED IN VOL. 10.05 1997 Tests characteristics of photoresists used for selective masking in microelectronic circuits.
| Committee |
ASTM
|
| DocumentType |
Test Method
|
| PublisherName |
American Society for Testing and Materials
|
| Status |
Withdrawn
|
| ASTM F 804 : 1983 : R1990 : EDT 1 | Practice for Producing Spin Coating Resist Thickness Curves (Withdrawn 1997) |
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