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VDI 2083 Blatt 3:2005-07

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

View Superseded by

Cleanroom technology - Metrology and test methods

Available format(s)

Hardcopy , PDF

Superseded date

04-08-2022

Superseded by

VDI 2083 Blatt 3:2022-08

Language(s)

German - English

Published date

01-07-2005

$185.16
Including GST where applicable

Preliminary note
Introduction
1 Scope and objective
2 References to other technical rules
3 Terms and definitions
4 Test methods
5 Measurement procedures
6 Documentation
7 Minimum requirements to be met by the
  test report
Bibliography

The document applies to measuring methods and measuring devices in connection with acceptance measurements and the monitoring of clean room technical systems in operation.

DocumentType
Standard
Pages
40
PublisherName
Verlag des Vereins Deutscher Ingenieure
Status
Superseded
SupersededBy
Supersedes

VDI 2083 Blatt 17:2013-06 Cleanroom technology - Compatibility of materials with the required cleanliness
DIN 1946-4:2016-06 (Draft) VENTILATION AND AIR CONDITIONING - PART 4: VENTILATION IN BUILDINGS AND ROOMS OF HEALTH CARE
VDI 2083 Blatt 3.1:2012-06 Cleanroom technology - Metrology in cleanroom air - Monitoring
VDI 2083 Blatt 15:2007-04 Cleanroom technology - Personnel at the clean work place
VDI 2083 Blatt 13.3:2010-10 Cleanroom technology - Quality, production, and distribution of ultrapure water - Pharmacy and other life-science applications
VDI 3803 Blatt 4:2012-09 Air-conditioning, system requirements - Air filter systems (VDI Ventilation Code of Practice)
VDI 2083 Blatt 2:2015-04 Cleanroom technology - Stipulations regarding the checking and monitoring of continued compliance with specifications
VDI 3491 Blatt 15:1996-12 Particulate matter measurement - Generation of test aerosols - Dilution systems with continuous volumetric flow
VDI 2083 Blatt 8.1:2014-10 Cleanroom technology - Air cleanliness chemical concentration (ACC)
VDI 2262 Blatt 4:2006-03 Workplace air - Reduction of exposure to air pollutants - Capture of air pollutants
VDI 6300 Blatt 1:2016-05 Genetic engineering operations in genetic engineering facilities - Guidance on safe operation of genetic engineering facilities
DIN 1946-4:2008-12 VENTILATION AND AIR CONDITIONING - PART 4: VAC SYSTEMS IN BUILDINGS AND ROOMS USED IN THE HEALTH CARE SECTOR
VDI 2083 Blatt 1:2013-01 Cleanroom technology - Particulate air cleanliness classes
VDI 2083 Blatt 9.1:2006-12 Clean room technology - Compatibility with required cleanliness and surface cleanliness
VDI/VDE 2627 Blatt 1:2015-12 Measuring rooms - Classification and characteristics - Planning and execution
VDI 2083 Blatt 13.2:2009-01 Cleanroom technology - Quality, production and distribution of ultrapure water - Microelectronics and other technical applications
VDI 2083 Blatt 12:2000-01 Cleanroom technology - Safety and environmental aspects
VDI 2083 Blatt 16.1:2010-08 Cleanroom technology - Barier systems (isolators, mini-environments, separative devices) - Effectiveness and certification
VDI 2083 Blatt 4.1:2006-10 Cleanroom technology - Planning, construction and start-up of cleanrooms
EN 12469:2000 Biotechnology - Performance criteria for microbiological safety cabinets

EN ISO 14644-4:2001 Cleanrooms and associated controlled environments - Part 4: Design, construction and start-up (ISO 14644-4:2001)
DIN EN 1822-4:2011-01 HIGH EFFICIENCY AIR FILTERS (EPA, HEPA AND ULPA) - PART 4: DETERMINING LEAKAGE OF FILTER ELEMENTS (SCAN METHOD)
DIN EN ISO 14644-1:2016-06 CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 1: CLASSIFICATION OF AIR CLEANLINESS BY PARTICLE CONCENTRATION (ISO 14644-1:2015)
EN ISO 14698-1:2003 Cleanrooms and associated controlled environments - Biocontamination control - Part 1: General principles and methods (ISO 14698-1:2003)
VDI 2083 Blatt 11:2008-01 Cleanroom technology - Quality assurance
DIN EN 61672-1:2014-07 ELECTROACOUSTICS - SOUND LEVEL METERS - PART 1: SPECIFICATIONS (IEC 61672-1:2013)
VDI 2083 Blatt 2:2015-04 Cleanroom technology - Stipulations regarding the checking and monitoring of continued compliance with specifications
DIN EN ISO 14644-3:2006-03 CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 3: TEST METHODS
ISO 14644-2:2015 Cleanrooms and associated controlled environments Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
VDI 2083 Blatt 1:2013-01 Cleanroom technology - Particulate air cleanliness classes
EN 1822-5:2009 High efficiency air filters (EPA, HEPA and ULPA) - Part 5: Determining the efficiency of filter elements
VDI 2083 Blatt 10:1998-02 Cleanroom technology - High-Purity/Ultra-High-Purity (HP-/UHP-)media supply systems
ISO 14644-5:2004 Cleanrooms and associated controlled environments — Part 5: Operations
DIN EN ISO 14644-2:2016-05 CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 2: MONITORING TO PROVIDE EVIDENCE OF CLEANROOM PERFORMANCE RELATED TO AIR CLEANLINESS BY PARTICLE CONCENTRATION (ISO 14644-2:2015)
EN 12599:2012 Ventilation for buildings - Test procedures and measurement methods to hand over air conditioning and ventilation systems
ISO 7726:1998 Ergonomics of the thermal environment Instruments for measuring physical quantities
VDI 2083 Blatt 12:2000-01 Cleanroom technology - Safety and environmental aspects
VDI 3489 Blatt 2:1995-12 Particulate matter measurement - Methods for characterizing and monitoring test aerosols - Continuous flow condensation nucleus counter
DIN EN ISO 14644-4:2003-06 Cleanrooms and associated controlled environments - Part 4: Design, construction and start up (ISO 14644-4:2001)
DIN EN 12599:2013-01 VENTILATION FOR BUILDINGS - TEST PROCEDURES AND MEASUREMENT METHODS TO HAND OVER AIR CONDITIONING AND VENTILATION SYSTEMS
VDI 2083 Blatt 4.1:2006-10 Cleanroom technology - Planning, construction and start-up of cleanrooms
VDI 3489 Blatt 8:1996-12 Particulate matter measurement - Methods for characterizing and monitoring test aerosols - Time-of-flight spectrometer
EN 1822-2:2009 High efficiency air filters (EPA, HEPA and ULPA) - Part 2: Aerosol production, measuring equipment, particle counting statistics
VDI 2083 Blatt 4:1996-02 Cleanroom technology - Surface cleanliness
DIN EN ISO 14644-5:2005-03 Cleanrooms and associated controlled environments - Part 5: Operations (ISO 14644-5:2004)
ISO 14698-1:2003 Cleanrooms and associated controlled environments Biocontamination control Part 1: General principles and methods
EN ISO 7726:2001 Ergonomics of the thermal environment - Instruments for measuring physical quantities (ISO 7726:1998)
DIN V ENV 1631:1997-03 CLEANROOM TECHNOLOGY - DESIGN, CONSTRUCTION AND OPERATION OF CLEANROOMS AND CLEAN AIR DEVICES
PREN ISO 14644-8 : DRAFT 2011 CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 8: CLASSIFICATION OF AIR CLEANLINESS BY CHEMICAL CONCENTRATION (ISO/DIS 14644-8:2011)
DIN EN 1822-1:2011-01 HIGH EFFICIENCY AIR FILTERS (EPA, HEPA AND ULPA) - PART 1: CLASSIFICATION, PERFORMANCE TESTING, MARKING
EN 61672-1:2013 Electroacoustics - Sound level meters - Part 1: Specifications
DIN EN 1822-2:2011-01 HIGH EFFICIENCY AIR FILTERS (EPA, HEPA AND ULPA) - PART 2: AEROSOL PRODUCTION, MEASURING EQUIPMENT, PARTICLE COUNTING STATISTICS
EN ISO 9001:2015 Quality management systems - Requirements (ISO 9001:2015)
ENV 1631 : 1996 CLEANROOM TECHNOLOGY - DESIGN, CONSTRUCTION AND OPERATION OF CLEANROOMS AND CLEAR AIR DEVICES
DIN EN 1822-3:2011-01 HIGH EFFICIENCY AIR FILTERS (EPA, HEPA AND ULPA) - PART 3: TESTING FLAT SHEET FILTER MEDIA
VDI 2083 Blatt 5:1996-02 Cleanroom technology - Thermal comfort
DIN EN 12469:2000-09 BIOTECHNOLOGY - PERFORMANCE CRITERIA FOR MICROBIOLOGICAL SAFETY CABINETS
VDI 3489 Blatt 3:1997-03 Particulate matter measurement - Methods of characterizing and monitoring test aerosols - Optical particle counter
EN ISO 14644-5:2004 Cleanrooms and associated controlled environments - Part 5: Operations (ISO 14644-5:2004)
ISO 14644-7:2004 Cleanrooms and associated controlled environments — Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments)
ISO 14644-1:2015 Cleanrooms and associated controlled environments Part 1: Classification of air cleanliness by particle concentration
VDI 2083 Blatt 7:2015-10 Cleanroom technology - Ultrapure media - Quality, supply, distribution
ISO 9001:2015 Quality management systems — Requirements
ISO 7730:2005 Ergonomics of the thermal environment — Analytical determination and interpretation of thermal comfort using calculation of the PMV and PPD indices and local thermal comfort criteria
EN 1822-3:2009 High efficiency air filters (EPA, HEPA and ULPA) - Part 3: Testing flat sheet filter media
DIN EN ISO 9001:2015-11 QUALITY MANAGEMENT SYSTEMS - REQUIREMENTS (ISO 9001:2015)
ISO 14644-4:2001 Cleanrooms and associated controlled environments — Part 4: Design, construction and start-up
EN 1822-1:2009 High efficiency air filters (EPA, HEPA and ULPA) - Part 1: Classification, performance testing, marking
VDI 2083 Blatt 8:2002-09 Cleanroom technology - Cleanroom suitability of operating materials
VDI 2083 Blatt 6:1996-11 Cleanroom technology - Personnel at the clean work place
EN ISO 14644-2:2015 Cleanrooms and associated controlled environments - Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration (ISO 14644-2:2015)
EN 12469:2000 Biotechnology - Performance criteria for microbiological safety cabinets
DIN EN 1822-5:2011-01 HIGH EFFICIENCY AIR FILTERS (EPA, HEPA AND ULPA) - PART 5: DETERMINING THE EFFICIENCY OF FILTER ELEMENTS
VDI 2083 Blatt 9:1991-09 (Draft) Clean room engineering; quality, production and distribution of superpurity water
EN ISO 14644-7:2004 Cleanrooms and associated controlled environments - Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments) (ISO 14644-7:2004)
DIN 5035-6:2006-11 Artificial lighting - Part 6: Measurement and evaluation
EN ISO 14644-1:2015 Cleanrooms and associated controlled environments - Part 1: Classification of air cleanliness by particle concentration (ISO 14644-1:2015)
EN 1822-4:2009 High efficiency air filters (EPA, HEPA and ULPA) - Part 4: Determining leakage of filter elements (scan method)
EN ISO 14644-3:2005 Cleanrooms and associated controlled environments - Part 3: Test methods (ISO 14644-3:2005)
VDI 3489 Blatt 1:1990-01 Particulate matter measurement; methods for characterizing and monitoring test aerosols (survey)

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