CEI EN 62047-6 : 2011
Current
The latest, up-to-date edition.
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 6: AXIAL FATIGUE TESTING METHODS OF THIN FILM MATERIALS
Hardcopy , PDF
English
01-01-2011
FOREWORD
1 Scope
2 Normative references
3 Terms and definitions
4 Test piece
5 Testing method and test apparatus
6 Endurances (test termination)
7 Test report
Annex A (informative) - Technical background of
this standard
Annex B (informative) - Test piece
Annex C (informative) - Displacement measurement
Annex D (informative) - Testing environment
Annex E (informative) - Number of test pieces
Bibliography
Annex ZA (normative) - Normative references to
international publications with their
corresponding European publications
Describes the method for axial tensile-tensile force fatigue testing of thin film materials with a length and width under 1 mm and a thickness in the range between 0,1 [mu]m and 10 [mu]m under constant force range or constant displacement range.
| Committee |
CT 309
|
| DevelopmentNote |
Classificazione CEI 47-71. (05/2011)
|
| DocumentType |
Standard
|
| Pages |
22
|
| PublisherName |
Comitato Elettrotecnico Italiano
|
| Status |
Current
|
| Standards | Relationship |
| EN 62047-6:2010 | Identical |
| IEC 62047-6:2009 | Identical |
| ASTM E 466 : 2015 : REDLINE | Standard Practice for Conducting Force Controlled Constant Amplitude Axial Fatigue Tests of Metallic Materials |
| IEC 62047-2:2006 | Semiconductor devices - Micro-electromechanical devices - Part 2: Tensile testing method of thin film materials |
| EN 62047-2:2006 | Semiconductor devices - Micro-electromechanical devices - Part 2: Tensile testing method of thin film materials |
| ISO 1099:2017 | Metallic materials — Fatigue testing — Axial force-controlled method |
| ISO 12107:2012 | Metallic materials — Fatigue testing — Statistical planning and analysis of data |
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