ASTM F 1376 : 1992 : R2020

1.1This guide covers corrosion resistant metallic alloys of the general class stainless steel, containing chromium, nickel, manganese, and silicon as major alloying additions and possibly molybdenum, that are qualified or specified for the materials of components used in high-purity gas supply systems for the semiconductor industry. This guide is primarily intended for testing to determine conformance to applicable composition and metallurgical specifications as stated in supplier product specifications or customer purchase specifications, or both.

1.2Elements analyzed and reported in this guide are as follows:

1.3Metallurgical characteristics to be analyzed and reported are inclusion contents, grain structure, mechanical properties, and intergranular corrosion susceptibility.

1.4Limitations:

1.5The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only.

1.6This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use.

1.7This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.