SEMI C31 : 2015
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR METHANOL
Published date
01-12-2013
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Pertains to standardize requirements for methanol used in the semiconductor industry and testing procedures to support those standards.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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