BS ISO 17331 : 2004
Current
The latest, up-to-date edition.
SURFACE CHEMICAL ANALYSIS - CHEMICAL METHODS FOR THE COLLECTION OF ELEMENTS FROM THE SURFACE OF SILICON-WAFER WORKING REFERENCE MATERIALS AND THEIR DETERMINATION BY TOTAL-REFLECTION X-RAY FLUORESCENCE (TXRF) SPECTROSCOPY
Hardcopy , PDF
English
01-01-2004
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Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Abbreviations
5 Reagents
6 Apparatus
7 Specimen preparation and measurement
environments
8 Preparation of calibration specimen
9 Making calibration curve
10 Collection of iron and/or nickel from working
reference material
11 Determination of iron and/or nickel of working
reference material
12 Precision
13 Test report
Annex A (informative) - International inter-laboratory
test results
Annex B (informative) - Results of international
inter-laboratory test programme using
GF-AAS and ICP-MS
Provides chemical methods for the collection of iron and/or nickel from the surface of silicon-wafer working reference materials by the vapour-phase decomposition method or the direct acid droplet decomposition method and their determination by total-reflection X-ray fluorescence (TXRF) spectroscopy.
| Committee |
CII/60
|
| DevelopmentNote |
Supersedes 02/122627 DC. (04/2005) 2004 Edition Re-Issued in September 2010 & incorporates AMD 1 2010. Supersedes 09/30189522 DC. (09/2010)
|
| DocumentType |
Standard
|
| Pages |
28
|
| PublisherName |
British Standards Institution
|
| Status |
Current
|
| Supersedes |
| Standards | Relationship |
| ISO 17331:2004 | Identical |
| ISO 14706:2014 | Surface chemical analysis Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy |
| ISO 14644-1:2015 | Cleanrooms and associated controlled environments Part 1: Classification of air cleanliness by particle concentration |
| ISO 5725-2:1994 | Accuracy (trueness and precision) of measurement methods and results Part 2: Basic method for the determination of repeatability and reproducibility of a standard measurement method |
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