BS EN ISO 14644-9:2012
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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Cleanrooms and associated controlled environments Classification of surface cleanliness by particle concentration
Hardcopy , PDF
08-07-2022
English
31-08-2012
Important note : All end users must be registered with an Account prior to user licenses being assigned.| Committee |
LBI/30
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| DevelopmentNote |
Supersedes 08/30190157 DC. (08/2012)
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| DocumentType |
Standard
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| Pages |
36
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| PublisherName |
British Standards Institution
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| Status |
Superseded
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| SupersededBy | |
| Supersedes |
This part of ISO14644 establishes the classification of cleanliness levels on solid surfaces by particle concentration in cleanrooms and associated controlled environment applications. Recommendations on testing and measuring methods, as well as information about surface characteristics, are given in AnnexesA to D.
This part of ISO14644 applies to all solid surfaces in cleanrooms and associated controlled environments, such as walls, ceilings, floors, working environments, tools, equipment and products. The classification of surface cleanliness by particle concentration (SCP) is limited to particles between 0,05µm and 500µm.
The following issues are not considered in this part of ISO14644:
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requirements for the cleanliness and suitability of surfaces for specific processes;
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procedures for the cleaning of surfaces;
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material characteristics;
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references to interactive bonding forces or generation processes that are usually time-dependent and process-dependent;
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selection and use of statistical methods for classification and testing;
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other characteristics of particles, such as electrostatic charge, ionic charges, microbiological state, etc.
| Standards | Relationship |
| EN ISO 14644-9:2012 | Identical |
| ISO 14644-9:2012 | Identical |
| SEMI E78 : 2012 | GUIDE TO ASSESS AND CONTROL ELECTROSTATIC DISCHARGE (ESD) AND ELECTROSTATIC ATTRACTION (ESA) FOR EQUIPMENT |
| ISO 14644-6:2007 | Cleanrooms and associated controlled environments Part 6: Vocabulary |
| ISO 4287:1997 | Geometrical Product Specifications (GPS) — Surface texture: Profile method — Terms, definitions and surface texture parameters |
| ISO 10015:1999 | Quality management Guidelines for training |
| ISO 16232-3:2007 | Road vehicles Cleanliness of components of fluid circuits Part 3: Method of extraction of contaminants by pressure rinsing |
| IEC 61340-5-1:2016 | Electrostatics - Part 5-1: Protection of electronic devices from electrostatic phenomena - General requirements |
| ISO 16232-2:2007 | Road vehicles Cleanliness of components of fluid circuits Part 2: Method of extraction of contaminants by agitation |
| ISO 16232-5:2007 | Road vehicles Cleanliness of components of fluid circuits Part 5: Method of extraction of contaminants on functional test bench |
| ISO 16232-4:2007 | Road vehicles Cleanliness of components of fluid circuits Part 4: Method of extraction of contaminants by ultrasonic techniques |
| ISO 10576-1:2003 | Statistical methods — Guidelines for the evaluation of conformity with specified requirements — Part 1: General principles |
| SEMI E43 : 2013 | RECOMMENDED PRACTICE FOR ELETROSTATIC MEASUREMENTS ON OBJECTS AND SURFACES |
| IEST RP CC022.2 : 2004(R2008) | ELECTROSTATIC CHARGE IN CLEANROOMS AND OTHER CONTROLLED ENVIRONMENTS |
| ISO/TS 21748:2004 | Guidance for the use of repeatability, reproducibility and trueness estimates in measurement uncertainty estimation |
| CLC/TR 61340-5-2:2008 | Electrostatics - Part 5-2: Protection of electronic devices from electrostatic phenomena - User guide |
| IEST STD CC1246 : 2013 | PRODUCT CLEANLINESS LEVELS - APPLICATIONS, REQUIREMENTS, AND DETERMINATION |
| ISO 5725-2:1994 | Accuracy (trueness and precision) of measurement methods and results Part 2: Basic method for the determination of repeatability and reproducibility of a standard measurement method |
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